CHE 419 - Advanced MEMS: Modeling & Packaging
- Credit Hours: 3R-3L-4C
- Term Available: F
- Graduate Studies Eligible: No
- Prerequisites: EP 410 or equivalent (See EP 411/511.)
- Corequisites: None
Design process, modeling; analytical and numerical. Actuators; dynamics and thermal issues. Use of software for layout and simulation. Characterization and reliability of MEMS devices. Electrical interfacing and packaging of MEMS. Microsensors, microfluidic systems, applications in engineering, biology, and physics. Students enrolled in CHE 419/519, must do project work on a topic selected by the instructor. Cross-listed with EP 411, and ECE 419.